JPH0134558Y2 - - Google Patents
Info
- Publication number
- JPH0134558Y2 JPH0134558Y2 JP10426682U JP10426682U JPH0134558Y2 JP H0134558 Y2 JPH0134558 Y2 JP H0134558Y2 JP 10426682 U JP10426682 U JP 10426682U JP 10426682 U JP10426682 U JP 10426682U JP H0134558 Y2 JPH0134558 Y2 JP H0134558Y2
- Authority
- JP
- Japan
- Prior art keywords
- comb
- electrode
- thermoplastic
- insulating support
- teeth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 6
- 229920001169 thermoplastic Polymers 0.000 claims description 5
- 239000004416 thermosoftening plastic Substances 0.000 claims description 5
- 239000011241 protective layer Substances 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 206010014357 Electric shock Diseases 0.000 description 2
- 239000012815 thermoplastic material Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10426682U JPS599789U (ja) | 1982-07-09 | 1982-07-09 | 静電吸着板の電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10426682U JPS599789U (ja) | 1982-07-09 | 1982-07-09 | 静電吸着板の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS599789U JPS599789U (ja) | 1984-01-21 |
| JPH0134558Y2 true JPH0134558Y2 (en]) | 1989-10-20 |
Family
ID=30244896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10426682U Granted JPS599789U (ja) | 1982-07-09 | 1982-07-09 | 静電吸着板の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS599789U (en]) |
-
1982
- 1982-07-09 JP JP10426682U patent/JPS599789U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS599789U (ja) | 1984-01-21 |
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